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About this product
Product Information
- This volume documents the Proceedings of the 5th and 6th Symposia on Particles on Surfaces: Detection, Adhesion and Removal, held under the aegis of the Fine Particle Society in Chicago (May 6-9, 1996) and Dallas (April 1-3, 1998) respectively. The technical programmes clearly reflected an interest and need to ameliorate the existing methods and to devise new and more efficient ways to detect, analyze and characterize particles on surfaces. The removal of particles from a host of surfaces was especially highlighted; the need to remove smaller and smaller particles was particularly underscored. All manuscripts included in this volume were properly peer reviewed and all were revised before inclusion in this volume. Thus, this book is not a mere collection of unreviewed papers, but represents information that has passed peer scrutiny. Furthermore, the authors of the 5th Symposium were asked to update the information. So, the information presented in this book should be as fresh and up-to-date as possible. This volume is divided into two parts: part 1 general papers and part 2 particle adhesion and removal. The topics covered include: high-sensitivity rapid detection of particles; detection of particles using evanescent wave scattering; particles on the backside of wafers; particle shedding from fluid-handling components; dynamics of particle adhesion; particle dispersion/aggregration; precision cleaning; and particle removal by surfactants, supercritical fluids, hydrodynamic forces, high-speed droplet impinging, megasonic, CO2 blasting, CO2 snow, argon aerosol, lasers, microcluster beams, brush and chemical-mechanical methods. This volume offers bountiful information and represents a current commentary on the R&D activity taking place in the area of particles on surfaces, particularly particle removal from a variety of surfaces.
Product Identifiers
- PublisherBrill
- ISBN-139789067643122
- eBay Product ID (ePID)86401000
Product Key Features
- Subject AreaChemical Engineering
- AuthorKash L. Mittal
- Publication NameParticles on Surfaces: Detection, Adhesion and Removal, Volume 6
- FormatHardcover
- LanguageEnglish
- SubjectChemistry, Physics
- Publication Year1999
- TypeTextbook
- Number of Pages352 Pages
Dimensions
- Item Height234mm
- Item Width156mm
- Item Weight794g
Additional Product Features
- EditorKash L. Mittal
- Country/Region of ManufactureNetherlands