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About this product
- DescriptionPresents a microtechnology important for manufacturing, design and application of microdevices. This book is aimed at engineers and advanced students.
- Author(s)M. Elwenspoek,Remco J. Wiegerink
- PublisherSpringer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Date of Publication27/11/2000
- GenreTechnology: General & Reference
- Series TitleMicrotechnology and MEMS
- Place of PublicationBerlin
- Country of PublicationGermany
- ImprintSpringer-Verlag Berlin and Heidelberg GmbH & Co. K
- Content Notebiography
- Weight609 g
- Width156 mm
- Height234 mm
- Spine19 mm
- Format DetailsLaminated cover
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