Chemical Vapor Deposition Polymerization : The Growth and Properties of...

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Item specifics

Condition
Good: A book that has been read, but is in good condition. Minimal damage to the book cover eg. ...
ISBN
9781402076886
Category

About this product

Product Identifiers

Publisher
Springer
ISBN-10
1402076886
ISBN-13
9781402076886
eBay Product ID (ePID)
5954163

Product Key Features

Number of Pages
Xvii, 102 Pages
Language
English
Publication Name
Chemical Vapor Deposition Polymerization : the Growth and Properties of Parylene Thin Films
Subject
Materials Science / General, Physics / Condensed Matter, Materials Science / Thin Films, Surfaces & Interfaces, General, Chemistry / Industrial & Technical
Publication Year
2003
Type
Textbook
Author
Jeffrey B. Fortin, Toh-Ming Lu
Subject Area
Technology & Engineering, Science
Format
Hardcover

Dimensions

Item Weight
27.5 Oz
Item Length
9.3 in
Item Width
6.1 in

Additional Product Features

Intended Audience
Scholarly & Professional
LCCN
2003-065275
Dewey Edition
22
Number of Volumes
1 vol.
Illustrated
Yes
Dewey Decimal
621.3815/2
Table Of Content
1. Introduction.- 2. Deposition Equipment.- 3. Step-by-Step Guide to Depositing Parylene.- 4. Parylene-N Precursor Chemistry.- 5. Deposition Kinetics for Polymerization via the Gorham Route.- 6. Film Properties.- 7. Other CVD Polymers.- References.
Synopsis
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
LC Classification Number
QC173.458.S87

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Vikataol

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