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Nanolithography: The Art of Fabricating Nanoele, Feldman,#

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Item specifics

Condition
New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ...
PublishedOn
2013-10-29
Title
Nanolithography: The Art of Fabricating Nanoelectronic and Nanop
Artist
Not Specified
ISBN
9780857095008
Publication Year
2013
Series
Woodhead Publishing Series in Electronic and Optical Materials
Type
Textbook
Format
Hardcover
Language
English
Subject Area
Material Science, Mechanical Engineering
Publication Name
Nanolithography: the Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems
Author
Martin Feldman
Publisher
Elsevier Science & Technology
Item Weight
1020 g
Number of Pages
592 Pages

About this product

Product Information

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing - some components are now just a few dozen atoms wide. This book attempts to answer the questions, What comes next? and How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own.

Product Identifiers

Publisher
Elsevier Science & Technology
ISBN-13
9780857095008
eBay Product ID (ePID)
12046689728

Product Key Features

Number of Pages
592 Pages
Publication Name
Nanolithography: the Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems
Language
English
Publication Year
2013
Type
Textbook
Subject Area
Material Science, Mechanical Engineering
Author
Martin Feldman
Series
Woodhead Publishing Series in Electronic and Optical Materials
Format
Hardcover

Dimensions

Item Weight
1020 g

Additional Product Features

Editor
Martin Feldman
Country/Region of Manufacture
United Kingdom

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