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Hajimete No Handotai Dry Etching Gijutsu, Paperback by Nojiri, Kazuo, Like Ne...
US $123.29
Approximately£92.84
Condition:
Like New
A book that has been read, but looks new. The book cover has no visible wear, and the dust jacket (if applicable) is included for hard covers. No missing or damaged pages, no creases or tears, no underlining or highlighting of text, and no writing in the margins. May have no identifying marks on the inside cover. No wear and tear. See the seller’s listing for full details and description of any imperfections.
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Located in: Jessup, Maryland, United States
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eBay item number:364112925955
Item specifics
- Condition
- ISBN
- 9783319356242
- Book Title
- Dry Etching Technology for Semiconductors
- Original Language
- Japanese
- Publisher
- Springer International Publishing A&G
- Item Length
- 9.2 in
- Publication Year
- 2016
- Format
- Trade Paperback
- Language
- English
- Illustrator
- Yes
- Item Height
- 0.3 in
- Genre
- Technology & Engineering, Science
- Topic
- Physics / Condensed Matter, Electronics / Semiconductors, Electronics / Microelectronics, Electronics / Circuits / General
- Item Weight
- 74.7 Oz
- Item Width
- 6.1 in
- Number of Pages
- Xiii, 116 Pages
About this product
Product Identifiers
Publisher
Springer International Publishing A&G
ISBN-10
3319356240
ISBN-13
9783319356242
eBay Product ID (ePID)
239885004
Product Key Features
Original Language
Japanese
Book Title
Dry Etching Technology for Semiconductors
Number of Pages
Xiii, 116 Pages
Language
English
Publication Year
2016
Topic
Physics / Condensed Matter, Electronics / Semiconductors, Electronics / Microelectronics, Electronics / Circuits / General
Illustrator
Yes
Genre
Technology & Engineering, Science
Format
Trade Paperback
Dimensions
Item Height
0.3 in
Item Weight
74.7 Oz
Item Length
9.2 in
Item Width
6.1 in
Additional Product Features
Intended Audience
Trade
Reviews
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc. , This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc., This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc."
Number of Volumes
1 vol.
Table Of Content
Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit.- Mechanism of Dry Etching.- Dry Etching of Various Materials.- Dry Etching Equipments.- Dry Etching Damage.- Latest Dry Etching Technologies.- Future Challenges and Outlook for Dry Etching Technology.
Synopsis
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes.The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.", This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc., Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit.- Mechanism of Dry Etching.- Dry Etching of Various Materials.- Dry Etching Equipments.- Dry Etching Damage.- Latest Dry Etching Technologies.- Future Challenges and Outlook for Dry Etching Technology.
LC Classification Number
TK7867-7867.5
Item description from the seller
Business seller information
Expert Trading Limited
John Boyer
9220 Rumsey Rd
Ste 101
21045-1956 Columbia, MD
United States
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Seller Feedback (353,466)
- 8***5 (18)- Feedback left by buyer.Past monthVerified purchaseI didn't see a verbal description of this book as "hardcover" or paperback. Cover design and price were similar to both cover styles. I thought I'd left a question for the seller, but I may have done something wrong. The package was too small to match the hardcovers previously received so I returned it unopened. Seller was very efficient, and packaging offered excellent protection. Haven't checked to see if refund was processed.
- w***t (660)- Feedback left by buyer.Past 6 monthsVerified purchasePERFECT TRANSACTION! Shipped right after payment, well packaged, arrived during the estimated time. The item is in great condition EXACTLY as described. Very Happy, very nice purchase. Excellent communication. Thank youWindfall Battleships : Agincourt, Canada, Erin, Eagle and the Balkan and Lati... (#386149502698)
- l***l (29)- Feedback left by buyer.Past yearVerified purchaseExcellent! This seller has really good prices, communication, packaging and fast shipping. The book I bought was better than described and I would definitely buy from this seller again. It was my time to have this book.🙌 A+++++El Kybalion by Trismegisto, Hermes, Like New Used, Free shipping in the US (#354955234211)
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