Picture 1 of 1
Picture 1 of 1
Dry Etching Technology for Semiconductors by Kazuo Nojiri (English) Paperback Bo
US $126.99
Approximately£100.11
Condition:
3 available
Postage:
Located in: Fairfield, Ohio, United States
Delivery:
Estimated between Tue, 9 Jul and Fri, 19 Jul to 43230
Returns:
Payments:
Shop with confidence
Seller assumes all responsibility for this listing.
eBay item number:364702687781
Item specifics
- Condition
- ISBN-13
- 9783319356242
- Type
- NA
- Publication Name
- NA
- ISBN
- 9783319356242
- Book Title
- Dry Etching Technology for Semiconductors
- Original Language
- Japanese
- Publisher
- Springer International Publishing A&G
- Item Length
- 9.2 in
- Publication Year
- 2016
- Format
- Trade Paperback
- Language
- English
- Illustrator
- Yes
- Item Height
- 0.3 in
- Genre
- Technology & Engineering, Science
- Topic
- Physics / Condensed Matter, Electronics / Semiconductors, Electronics / Microelectronics, Electronics / Circuits / General
- Item Weight
- 74.7 Oz
- Item Width
- 6.1 in
- Number of Pages
- Xiii, 116 Pages
About this product
Product Information
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes.The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc."
Product Identifiers
Publisher
Springer International Publishing A&G
ISBN-10
3319356240
ISBN-13
9783319356242
eBay Product ID (ePID)
239885004
Product Key Features
Original Language
Japanese
Book Title
Dry Etching Technology for Semiconductors
Number of Pages
Xiii, 116 Pages
Language
English
Publication Year
2016
Topic
Physics / Condensed Matter, Electronics / Semiconductors, Electronics / Microelectronics, Electronics / Circuits / General
Illustrator
Yes
Genre
Technology & Engineering, Science
Format
Trade Paperback
Dimensions
Item Height
0.3 in
Item Weight
74.7 Oz
Item Length
9.2 in
Item Width
6.1 in
Additional Product Features
Intended Audience
Trade
Reviews
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc. , This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc., This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc."
Number of Volumes
1 Vol.
Lc Classification Number
Tk7867-7867.5
Table of Content
Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit.- Mechanism of Dry Etching.- Dry Etching of Various Materials.- Dry Etching Equipments.- Dry Etching Damage.- Latest Dry Etching Technologies.- Future Challenges and Outlook for Dry Etching Technology.
Copyright Date
2015
Item description from the seller
Business seller information
Premier Books LLC
David Taylor
26C Trolley Sq
19806-3356 Wilmington, DE
United States
I certify that all my selling activities will comply with all EU laws and regulations.
Seller assumes all responsibility for this listing.
eBay item number:364702687781
Post to me
Item location:
Fairfield, Ohio, United States
Posts to:
Afghanistan, Albania, Algeria, Andorra, Angola, Anguilla, Antigua and Barbuda, Argentina, Armenia, Aruba, Australia, Austria, Azerbaijan Republic, Bahamas, Bahrain, Bangladesh, Belgium, Belize, Benin, Bermuda, Bhutan, Bolivia, Bosnia and Herzegovina, Botswana, Brazil, British Virgin Islands, Brunei Darussalam, Bulgaria, Burkina Faso, Burundi, Cambodia, Cameroon, Canada, Cape Verde Islands, Cayman Islands, Central African Republic, Chad, Chile, China, Colombia, Comoros, Cook Islands, Costa Rica, Cyprus, Czech Republic, Côte d'Ivoire (Ivory Coast), Democratic Republic of the Congo, Denmark, Djibouti, Dominica, Dominican Republic, Ecuador, Egypt, El Salvador, Equatorial Guinea, Eritrea, Estonia, Ethiopia, Falkland Islands (Islas Malvinas), Fiji, Finland, France, Gabon Republic, Gambia, Georgia, Germany, Ghana, Gibraltar, Greece, Greenland, Grenada, Guatemala, Guernsey, Guinea, Guinea-Bissau, Guyana, Haiti, Honduras, Hong Kong, Hungary, Iceland, India, Indonesia, Iraq, Ireland, Israel, Italy, Jamaica, Japan, Jersey, Jordan, Kazakhstan, Kenya, Kiribati, Kuwait, Kyrgyzstan, Laos, Latvia, Lebanon, Lesotho, Liberia, Liechtenstein, Lithuania, Luxembourg, Macau, Macedonia, Madagascar, Malawi, Malaysia, Maldives, Mali, Malta, Mauritania, Mauritius, Mayotte, Mexico, Moldova, Monaco, Mongolia, Montenegro, Montserrat, Morocco, Mozambique, Namibia, Nauru, Nepal, Netherlands, Netherlands Antilles, New Zealand, Nicaragua, Niger, Nigeria, Niue, Norway, Oman, Pakistan, Paraguay, Peru, Philippines, Poland, Portugal, Qatar, Republic of Croatia, Republic of the Congo, Romania, Rwanda, Saint Helena, Saint Kitts-Nevis, Saint Lucia, Saint Pierre and Miquelon, Saint Vincent and the Grenadines, San Marino, Saudi Arabia, Senegal, Serbia, Seychelles, Sierra Leone, Singapore, Slovakia, Slovenia, Solomon Islands, Somalia, South Africa, South Korea, Spain, Sri Lanka, Suriname, Svalbard and Jan Mayen, Swaziland, Sweden, Switzerland, Taiwan, Tajikistan, Tanzania, Thailand, Togo, Tonga, Trinidad and Tobago, Tunisia, Turkey, Turkmenistan, Turks and Caicos Islands, Tuvalu, Uganda, United Arab Emirates, United Kingdom, Uruguay, Uzbekistan, Vanuatu, Vatican City State, Vietnam, Wallis and Futuna, Western Sahara, Worldwide, Yemen, Zambia, Zimbabwe
Excludes:
APO/FPO, Alaska/Hawaii, Barbados, Belarus, French Guiana, French Polynesia, Guadeloupe, Libya, Martinique, New Caledonia, Panama, Papua New Guinea, Reunion, Russian Federation, US Protectorates, Ukraine, Venezuela, Western Samoa
Postage and packaging | Each additional item | To | Service | Delivery*See Delivery notes |
---|---|---|---|---|
Free postage | Free | United States | Economy Shipping | Estimated between Tue, 9 Jul and Fri, 19 Jul to 43230 |
Dispatch time |
---|
Will usually dispatch within 10 working days of receiving cleared payment. |
Taxes |
---|
Taxes may be applicable at checkout. Learn moreLearn more about paying tax on eBay purchases. |
Sales tax for an item #364702687781
Sales tax for an item #364702687781
Seller collects sales tax/VAT for items dispatched to the following states:
County | VAT rate |
---|
Returns policy
After receiving the item, cancel the purchase within | Refund will be given as | Return postage |
---|---|---|
30 days | Money back | Buyer pays for return postage |
Refer to eBay return policyopens in a new tab or window for more details. You're covered by the eBay Money Back Guaranteeopens in a new tab or window if you receive an item that is not as described in the listing.
The buyer is responsible for return postage costs.
Return policy details |
---|
Returns accepted |
Most purchases from business sellers are protected by the Consumer Contract Regulations 2013 which give you the right to cancel the purchase within 14 days after the day you receive the item. Find out more about your rights as a buyer and exceptions.
Payment details
Payment methods
Popular categories from this shop
Registered as a business seller
Seller Feedback (1,025,529)
i***6 (139)- Feedback left by buyer.
Past 6 months
Verified purchase
Item as described, good price, well packaged, arrived slightly later than hoped (not in time for Christmas ) but the order was placed in a very busy shipping period. No issue with the seller’s speed of response and sending the item. Great seller!
l***a (3517)- Feedback left by buyer.
Past month
Verified purchase
Excellent seller. Timely shipping, safe packing, good communication, great price and as described. Thank you. A+++
o***b (144)- Feedback left by buyer.
Past month
Verified purchase
The seller is one of the best there is - high quality books, reasonable prices, securely packaged.
I do, however, recommend some changes to their shipping - they show a shipper (SortHub) on eBay, but the tracking # they email is for a different carrier. It’s difficult to know where my purchase is.
This time, it was delivered a week late. In the grand scheme of things not a big deal. But it shouldn’t be this difficult to accurately track my purchase.
Product ratings and reviews
More to explore:
- Engineering & Technology Paperback Antiquarian & Collectable Books in English,
- Engineering & Technology Paperback Adult Learning & University Books in English,
- Engineering & Technology Paperback Fiction & Non-Fiction Books in English,
- Engineering & Technology Non-Fiction Transport Technology Paperback Fiction & Non-Fiction Books in English,
- Engineering & Technology Non-Fiction Applied Technology Paperback Fiction & Non-Fiction Books in English,
- Technology Books in English,
- Paperbacks Books in English,
- Paperback Fiction Books in English,
- Paperback Language Course in English,
- Paperback Vintage Paperback Antiquarian & Collectable Books in English