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Fundamentals of Semiconductor Manufacturing and Process Control May Hardback

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Item specifics

Condition
New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ...
BIC Subject Area 1
Electronics & communications engineering [TJ]
Book Title
Fundamentals of Semiconductor Manufacturing and Process Control
ISBN
0471784060
Publication Date
16/06/2006
Item Depth
29
Subject Area
Material Science
Publication Name
Fundamentals of Semiconductor Manufacturing and Process Control
Publisher
John Wiley & Sons INC International Concepts
Publication Year
2006
Series
Ieee Press
Type
Textbook
Format
Hardcover
Language
English
Item Height
243 mm
Author
Costas J. Spanos, Gary S. May
Item Weight
844 g
Item Width
158 mm
Number of Pages
488 Pages

About this product

Product Information

A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Chapters include case studies, sample problems, and suggested exercises * Instructor support includes electronic copies of the figures and an instructor's manual Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department. An Instructor Support FTP site is also available.

Product Identifiers

Publisher
John Wiley & Sons INC International Concepts
ISBN-13
9780471784067
eBay Product ID (ePID)
86614112

Product Key Features

Number of Pages
488 Pages
Publication Name
Fundamentals of Semiconductor Manufacturing and Process Control
Language
English
Publication Year
2006
Type
Textbook
Subject Area
Material Science
Author
Costas J. Spanos, Gary S. May
Series
Ieee Press
Format
Hardcover

Dimensions

Item Height
243 mm
Item Weight
844 g
Item Width
158 mm

Additional Product Features

Country/Region of Manufacture
United States
Title_Author
Costas J. Spanos, Gary S. May

Item description from the seller

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Additional information:
Freshly Printed Books is a trading name of Partrad Limited
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