Microdevices Ser.: Electron and Ion Optics by Miklos Szilagyi (2011, Trade Paperback)

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ISBN-13: 9781461282471, 978-1461282471. ded to the formation of fine probes. The current trend is towards increased circuit complexity and pattern density. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

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Product Identifiers

PublisherSpringer
ISBN-101461282470
ISBN-139781461282471
eBay Product ID (ePID)176588415

Product Key Features

Number of Pages556 Pages
LanguageEnglish
Publication NameElectron and Ion Optics
SubjectElectrical, Materials Science / Electronic Materials
Publication Year2011
TypeTextbook
AuthorMiklos Szilagyi
Subject AreaTechnology & Engineering
SeriesMicrodevices Ser.
FormatTrade Paperback

Dimensions

Item Weight33.7 oz.
Item Length9.6 in
Item Width6.7 in

Additional Product Features

Intended AudienceScholarly & Professional

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