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MEMS: A Practical Guide of Design, Analysis, and Applications by Jan Korvink, Oliver Paul (Paperback, 2019)

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ISBN-13: 9783662568354, 978-3662568354. Subjects such as transducer operations and free-space microsystems are contained in its chapters. This will interest engineering and research scientists in industry and academia.

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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.