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Microlithography : Science and Technology by Kazuaki Suzuki (2020, Hardcover)
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ISBN-13: 9781439876756, 978-1439876756. The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition.
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About this product
Product Identifiers
PublisherTaylor & Francis Group
ISBN-101439876754
ISBN-139781439876756
eBay Product ID (ePID)233771813
Product Key Features
Number of Pages838 Pages
Publication NameMicrolithography : Science and Technology
LanguageEnglish
SubjectLasers & Photonics, Electronics / Semiconductors, Electronics / Microelectronics, Electronics / Circuits / Integrated, Electrical, Manufacturing, Industrial Technology
Publication Year2020
TypeTextbook
Subject AreaTechnology & Engineering
AuthorKazuaki Suzuki
FormatHardcover
Dimensions
Item Weight57.4 oz.
Item Length10 in
Item Width7 in
Additional Product Features
Edition Number3
Intended AudienceCollege Audience
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