MOS (Metal Oxide Semiconductor) Physics and Technology by J. R. Brews and E. H. Nicollian (2002, Trade Paperback)
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ISBN-13: 9780471430797, 978-0471430797. Emphasizes the silica and the silica-silicon interface. Contains information needed to grow an oxide, make an MOS capacitor array, and fabricate an integrated circuit with optimal performance and stability.