Product Information
Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.Product Identifiers
PublisherJohn Wiley & Sons
ISBN-139783527407408
eBay Product ID (ePID)89101826
Product Key Features
Number of Pages563 Pages
Publication NamePlasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication
LanguageEnglish
SubjectPhysics
Publication Year2008
TypeTextbook
Subject AreaMechanical Engineering, Nanotechnology
AuthorKostya Ostrikov
Dimensions
Item Height247 mm
Item Weight1192 g
Additional Product Features
Country/Region of ManufactureGermany
Title_AuthorKostya Ostrikov