Vakuumbeschichtung: Band 2: Verfahren Und Anlagen by Klaus Rc6ll, Gerard Kienel, Klaus Rvll, Klaus Rall (Hardcover, 1997)

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Product Information

Schwerpunkte in Band 2 bilden das Aufdampfen im Hochvakuum, das Ionenplattieren, die KathodenzerstAubung, teilchengestA1/4tzte Verfahren, die Erzeugung von Mikrostrukturen, Plasmabehandlungsverfahren und die Abscheidung aus der Gasphase (CVD).

Product Identifiers

PublisherSpringer-Verlag Berlin AND Heidelberg Gmbh & Co. KG
ISBN-139783540622666
eBay Product ID (ePID)91197310

Product Key Features

SubjectEngineering & Technology
Publication Year1997
Publication NameVakuumbeschichtung: Band 2: Verfahren Und Anlagen
LanguageEnglish, German
TypeTextbook
AuthorKlaus Rc6ll, Gerard Kienel, Klaus Rvll, Klaus Rall
SeriesVdi-Buch
FormatHardcover

Additional Product Features

Country/Region of ManufactureGermany
EditorKlaus Rc6ll, Klaus Rall, Klaus Rvll, Gerard Kienel

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