Dover Civil and Mechanical Engineering Ser.: User's Guide to Ellipsometry by Nicholas Poussin and Harland G. Tompkins (2006, Perfect)
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Three appendices provide helpful references. by Harland G. Tompkins, Nicholas Poussin. Theoretical Aspects 2. The Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1. Ion Beam Interaction with Silicon Case 3.