Manufacturable Process Tool for High Metal Gate 9783836481564 Book
Be the first to write a review
Brand new: lowest price
£87.76
Free postage- Get it by Fri, 27 Jul - Wed, 15 Aug from New York, United States
- • New condition
- • 30 day returns - Buyer pays return postage | Returns policy
Format: Paperback / softback. Paperback / softback. Off state leakage current related power dominates the CMOS heat dissipation problem of state of the art silicon integrated circuits. A system for monolayer photoassisted deposition was modified to deposit high-quality HfO2 films with in-situ clean, in-situ oxide film deposition, and in-situ anneal capability.
Registered as business seller